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ALPHA OMEGA IN SAPPHIRE
TECHNOLOGY
TECHNOLOGY
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ISG1500장비소개
- INSIGHT320
- INSIGHT1000
- ISG1000
- 2008Establishment
- 2020Insight320
- 2011Insight1000
- 2012
- 2013 ~ 2014ISG1000
- 2015 ~Developing of New Models (150kg)
ISG1500
EQUIPMENT
Self designed and developed furnace (120kg 이상)
AZTEC is an expert proven by our own mass productionAZTEC has an experiential know-how on the process technology
| SYSTEM | ISG1500 |
|---|---|
| Productivity (TIE mm/boule) | 7,500 |
| Dimensions (W X L X H, mm) | 3,500 X 2,200 X 3,300 |
| Weight (kg) | 4,850 |
| Cycle Time (day) | 20 |
| Main Supply Power | 380VAC(±3%),50(60)㎐, 3Phase (5Wire) |
| Max. Power Supply Capacity(㎾) | 90 |
| Coolant Consumption (㎥/h) | 8.0 |
| Coolant Pressure (㎫) | 0.3 |
| Ambient gas (LPM) | 30 |
| Coolant Temperature (℃) | 22~30 |
| Chamber Pressure | Vacuum : 4.2x10-2 (torr) |
| Atmosphere : 780(mmHg) |